Impurity Doping Processes in Silicon by F. F. Y. Wang

By F. F. Y. Wang

This publication introduces to non-experts a number of very important procedures of impurity doping in silicon and is going directly to speak about the tools of selection of the focus of dopants in silicon. the normal strategy used is the dialogue technique, yet, because it has been sufficiently coated in lots of texts, this paintings describes the double-diffusion process

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